Functions and Features

Compatible with 8”/12” wafer sizes
The fork can be configured to flip or transfer wafers and substrates using vacuum suction or negative pressure, according to user requirements
The wafer-handling arm is equipped with a horizontal motorized slide axis and can be configured with two load ports for loading and unloading (customizable based on requirements)
Supports a pre aligner unit, clean unit, bubble clean unit, and roller brush clean unit to meet various process requirements
Communication Interface: RS232 and I/O control communication
Complies with SECS/GEM standards and includes system-handshake and parameter-collection functions
User-friendly human-machine interface for easy and intuitive operation
Configurable according to different process requirements to support various wafer-transfer workflows
Load port, wafer-tossing system, production-history management, and other functions can be tailored as needed

Specification

TEL : +886 3 2755528
FAX: +886 3 2755529
service@innotek-applied.com